Thickness Dependence of crack initiation and propagation in stacks for piezoelectric microelectromechanical systems

Kathleen Coleman; Raul Bermejo; Dominique Leguillon; Susan Trolier-McKinstry

doi:10.1016/j.actamat.2020.03.030

Thickness Dependence of crack initiation and propagation in stacks for piezoelectric microelectromechanical systems

Kathleen Coleman, Raul Bermejo, Dominique Leguillon, Susan Trolier-McKinstry

Chair of Structural and Functional Ceramics (410)

Research output: Contribution to journal › Article › Research › peer-review

5 Citations (Scopus)

Original language	Undefined/Unknown
Pages (from-to)	245-252
Journal	Acta Materialia
Volume	191
DOIs	https://doi.org/10.1016/j.actamat.2020.03.030
Publication status	Published - Jun 2020

Keywords

Thin film, PZT, Cracking, Stress criterion, Biaxial bending

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10.1016/j.actamat.2020.03.030

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@article{f725c5baa1f9461e868bcb76543b2b1e,

title = "Thickness Dependence of crack initiation and propagation in stacks for piezoelectric microelectromechanical systems",

keywords = "Thin film, PZT, Cracking, Stress criterion, Biaxial bending",

author = "Kathleen Coleman and Raul Bermejo and Dominique Leguillon and Susan Trolier-McKinstry",

year = "2020",

month = jun,

doi = "10.1016/j.actamat.2020.03.030",

language = "Undefined/Unknown",

volume = "191",

pages = "245--252",

journal = "Acta Materialia",

issn = "1359-6454",

publisher = "Acta Materialia Inc",

}

TY - JOUR

T1 - Thickness Dependence of crack initiation and propagation in stacks for piezoelectric microelectromechanical systems

AU - Coleman, Kathleen

AU - Bermejo, Raul

AU - Leguillon, Dominique

AU - Trolier-McKinstry, Susan

PY - 2020/6

Y1 - 2020/6

KW - Thin film, PZT, Cracking, Stress criterion, Biaxial bending

UR - https://doi.org/10.1016/j.actamat.2020.03.030

U2 - 10.1016/j.actamat.2020.03.030

DO - 10.1016/j.actamat.2020.03.030

M3 - Article

SN - 1359-6454

VL - 191

SP - 245

EP - 252

JO - Acta Materialia

JF - Acta Materialia

ER -

Thickness Dependence of crack initiation and propagation in stacks for piezoelectric microelectromechanical systems

Keywords

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