@article{f725c5baa1f9461e868bcb76543b2b1e,
title = "Thickness Dependence of crack initiation and propagation in stacks for piezoelectric microelectromechanical systems",
keywords = "Thin film, PZT, Cracking, Stress criterion, Biaxial bending",
author = "Kathleen Coleman and Raul Bermejo and Dominique Leguillon and Susan Trolier-McKinstry",
year = "2020",
month = jun,
doi = "10.1016/j.actamat.2020.03.030",
language = "Undefined/Unknown",
volume = "191",
pages = "245--252",
journal = "Acta Materialia",
issn = "1359-6454",
publisher = "Acta Materialia Inc",
}