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Thickness Dependence of crack initiation and propagation in stacks for piezoelectric microelectromechanical systems

  • Kathleen Coleman
  • , Raul Bermejo
  • , Dominique Leguillon
  • , Susan Trolier-McKinstry

Research output: Contribution to journalArticleResearchpeer-review

5 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)245-252
JournalActa Materialia
Volume191
DOIs
Publication statusPublished - Jun 2020

Keywords

  • Thin film, PZT, Cracking, Stress criterion, Biaxial bending

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