Time-resolved ion energy and charge state distributions in pulsed cathodic arc plasmas of Bn-Al cathodes in high vacuum

Siegfried Zöhrer, André Anders, Robert Franz

Research output: Contribution to journalArticleResearchpeer-review

6 Citations (Scopus)
Original languageEnglish
Pages (from-to)1-17
JournalPlasma sources science & technology
DOIs
Publication statusPublished - 2018

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