TiN diffusion barrier failure by the formation of Cu3Si investigated by electron microscopy and atom probe tomography

Marlene Mühlbacher; Grzegorz Greczynski; Bernhard Sartory; Francisca Mendez Martin; Nina Schalk; Jun Lu; Lars Hultman; Christian Mitterer

doi:10.1116/1.4942003

TiN diffusion barrier failure by the formation of Cu3Si investigated by electron microscopy and atom probe tomography

Marlene Mühlbacher
, Grzegorz Greczynski
, Bernhard Sartory
, Francisca Mendez Martin
, Nina Schalk
, Jun Lu
, Lars Hultman
, Christian Mitterer

Research output: Contribution to journal › Article › Research › peer-review

13 Citations (Scopus)

Original language	English
Article number	022202
Pages (from-to)	1-8
Number of pages	8
Journal	Journal of Vacuum Science and Technology B, JVSTB
Volume	34.2016
Issue number	2
DOIs	https://doi.org/10.1116/1.4942003
Publication status	Published - 19 Feb 2016

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10.1116/1.4942003

Cite this

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title = "TiN diffusion barrier failure by the formation of Cu3Si investigated by electron microscopy and atom probe tomography",

author = "Marlene M{\"u}hlbacher and Grzegorz Greczynski and Bernhard Sartory and \{Mendez Martin\}, Francisca and Nina Schalk and Jun Lu and Lars Hultman and Christian Mitterer",

year = "2016",

month = feb,

day = "19",

doi = "10.1116/1.4942003",

language = "English",

volume = "34.2016",

pages = "1--8",

journal = "Journal of Vacuum Science and Technology B, JVSTB",

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publisher = "American Institute of Physics",

number = "2",

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TiN diffusion barrier failure by the formation of Cu3Si investigated by electron microscopy and atom probe tomography. / Mühlbacher, Marlene; Greczynski, Grzegorz; Sartory, Bernhard et al.
In: Journal of Vacuum Science and Technology B, JVSTB, Vol. 34.2016, No. 2, 022202, 19.02.2016, p. 1-8.

Research output: Contribution to journal › Article › Research › peer-review

TY - JOUR

T1 - TiN diffusion barrier failure by the formation of Cu3Si investigated by electron microscopy and atom probe tomography

AU - Mühlbacher, Marlene

AU - Greczynski, Grzegorz

AU - Sartory, Bernhard

AU - Mendez Martin, Francisca

AU - Schalk, Nina

AU - Lu, Jun

AU - Hultman, Lars

AU - Mitterer, Christian

PY - 2016/2/19

Y1 - 2016/2/19

U2 - 10.1116/1.4942003

DO - 10.1116/1.4942003

M3 - Article

SN - 2166-2746

VL - 34.2016

SP - 1

EP - 8

JO - Journal of Vacuum Science and Technology B, JVSTB

JF - Journal of Vacuum Science and Technology B, JVSTB

IS - 2

M1 - 022202

ER -