Topographical and structural investigations of phosphorous-doped silicon films

K Sorschag, H Gold, J Lutz, Friedemar Kuchar, M Pippan, H Noll

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Translated title of the contribution	Topographical and structural investigations of phosphorous-doped silicon films
Original language	English
Pages (from-to)	999-1002
Journal	Applied physics / A (Series A, Materials science & processing)
Volume	66
Publication status	Published - 1998

Cite this

@article{5339a2110f5b4debb0c05adc85223372,

title = "Topographical and structural investigations of phosphorous-doped silicon films",

author = "K Sorschag and H Gold and J Lutz and Friedemar Kuchar and M Pippan and H Noll",

year = "1998",

language = "English",

volume = "66",

pages = "999--1002",

journal = "Applied physics / A (Series A, Materials science & processing)",

issn = "0340-3793",

publisher = "Springer Berlin",

}

TY - JOUR

T1 - Topographical and structural investigations of phosphorous-doped silicon films

AU - Sorschag, K

AU - Gold, H

AU - Lutz, J

AU - Kuchar, Friedemar

AU - Pippan, M

AU - Noll, H

PY - 1998

Y1 - 1998

M3 - Article

SN - 0340-3793

VL - 66

SP - 999

EP - 1002

JO - Applied physics / A (Series A, Materials science & processing)

JF - Applied physics / A (Series A, Materials science & processing)

ER -