Towards high-rate magnetron sputter deposition: Influence of discharge power on deposition process and coating properties

Christian Saringer

Research output: Contribution to conferencePresentationResearchpeer-review

Original languageEnglish
Publication statusPublished - 25 Apr 2017
Event44th International Conference on Metal Coatings and Thin Films 2017 - San Diego, United States
Duration: 23 Apr 201728 Apr 2017

Conference

Conference44th International Conference on Metal Coatings and Thin Films 2017
Abbreviated title44th ICMCTF
Country/TerritoryUnited States
CitySan Diego
Period23/04/1728/04/17

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