Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature

Julian Pilz; Alberto Perrotta; Paul Christian; Martin Tazreiter; Roland Resel; Günther Leising; Thomas Griesser; Anna Maria Coclite

doi:10.1116/1.5003334

Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature

Julian Pilz, Alberto Perrotta, Paul Christian, Martin Tazreiter, Roland Resel, Günther Leising, Thomas Griesser, Anna Maria Coclite

Technische Universität Graz

Research output: Contribution to journal › Article › Research › peer-review

13 Citations (Scopus)

Original language	English
Article number	01A109
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	36
Issue number	1
DOIs	https://doi.org/10.1116/1.5003334
Publication status	Published - 1 Jan 2018

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AU - Leising, Günther

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AU - Coclite, Anna Maria

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Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature

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