Neuester Forschungsoutput

• Influence of discharge power and bias potential on microstructure and hardness of sputtered amorphous carbon coatings

  Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)

• Towards high-rate magnetron sputter deposition: Influence of discharge power on deposition process and coating properties

  Publikationen: Konferenzbeitrag › Vortrag › Forschung › (peer-reviewed)

• Spatial distribution of plasma properties in a dc-magnetron discharge and influence of the discharge power

  Publikationen: Konferenzbeitrag › Poster › Forschung › (peer-reviewed)