Neuester Forschungsoutput

• Surface modifications on cathode during cathodic arc deposition: phase evaluation

  Publikationen: Konferenzbeitrag › Poster › Forschung

• Substrate-influenced thermo-mechanical fatigue of copper metallizations: Limits of Stoney's equation

  Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)

• Film thickness dependent microstructural changes of thick copper metallizations upon thermal fatigue

  Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)