Correlating structural and mechanical properties of AlN / TiN superlattice films

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)


  • Nikola Koutná
  • Petr Rehák
  • Zhuo Chen
  • Matthias Bartosik
  • Markus Fallmann
  • Miroslav Cerny
  • Zhaoli Zhang
  • Martin Friák
  • Mojmír Šob
  • Paul Heinz Mayrhofer

Externe Organisationseinheiten

  • Erich Schmid Institute of Materials Science of the Austrian Academy of Sciences
  • Institute of Materials Science, TU Wien
  • Academy of Sciences of the Czech Republic
  • Institute of Materials Science and Technology, TU Wien
  • Central European Institute of Technology, CEITEC MU, Masaryk University
  • Masaryk University
  • Brno University of Technology


Combining first-principles and experimental techniques, we establish Young's modulus dependence of AlN/TiN superlattices on the film-forming phases, their thicknesses and crystallographic orientations. The disparate character of cleavage properties within different layers of the superlattice—providing indications regarding crack initiation processes—is linked to the changes in bond lengths. Such changes present a direct consequence of the predicted interplanar spacing oscillations which are experimentally confirmed by high resolution transmission electron microscopy analyses.


Seiten (von - bis)159-163
FachzeitschriftScripta materialia
StatusVeröffentlicht - 1 Mai 2019