Correlating structural and mechanical properties of AlN / TiN superlattice films

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

Autoren

  • Nikola Koutná
  • Petr Rehák
  • Zhuo Chen
  • Matthias Bartosik
  • Markus Fallmann
  • Miroslav Cerny
  • Zhaoli Zhang
  • Martin Friák
  • Mojmír Šob
  • Paul Heinz Mayrhofer

Externe Organisationseinheiten

  • Erich Schmid Institute of Materials Science of the Austrian Academy of Sciences
  • Institute of Materials Science, TU Wien
  • Institute of Physics of Materials, Academy of Sciences of the Czech Rebublic
  • Institute of Physics of Materials, Academy of Sciences of the Czech Republic
  • Institute of Materials Science and Technology, TU Wien
  • Central European Institute of Technology, CEITEC MU, Masaryk University
  • Department of Condensed Matter Physics, Faculty of Science, Masaryk University
  • Department of Chemistry, Faculty of Science, Masaryk University
  • Central European Institute of Technology, CEITEC VUT Brno University of Technology

Abstract

Combining first-principles and experimental techniques, we establish Young's modulus dependence of AlN/TiN superlattices on the film-forming phases, their thicknesses and crystallographic orientations. The disparate character of cleavage properties within different layers of the superlattice—providing indications regarding crack initiation processes—is linked to the changes in bond lengths. Such changes present a direct consequence of the predicted interplanar spacing oscillations which are experimentally confirmed by high resolution transmission electron microscopy analyses.

Details

OriginalspracheEnglisch
Seiten (von - bis)159-163
Seitenumfang5
FachzeitschriftScripta materialia
Jahrgang165.2019
AusgabenummerMay
DOIs
StatusVeröffentlicht - 1 Mai 2019