Effect of crystal orientation on the hardness and strength of piezoelectric LiNbO3 substrates for microelectronic applications

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@article{cd021a152264436b92e4812f1d4f627c,
title = "Effect of crystal orientation on the hardness and strength of piezoelectric LiNbO3 substrates for microelectronic applications",
author = "Manuel Gruber and Alexander Leitner and Daniel Kiener and Peter Supancic and Raul Bermejo",
year = "2022",
doi = "https://doi.org/10.1016/j.matdes.2021.110306",
language = "English",
journal = "Materials and Design",
issn = "0264-1275",
publisher = "Elsevier",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Effect of crystal orientation on the hardness and strength of piezoelectric LiNbO3 substrates for microelectronic applications

AU - Gruber, Manuel

AU - Leitner, Alexander

AU - Kiener, Daniel

AU - Supancic, Peter

AU - Bermejo, Raul

PY - 2022

Y1 - 2022

U2 - https://doi.org/10.1016/j.matdes.2021.110306

DO - https://doi.org/10.1016/j.matdes.2021.110306

M3 - Article

JO - Materials and Design

JF - Materials and Design

SN - 0264-1275

M1 - 110306

ER -