Influence of the deposition parameters on the nanolamella periodicity of chemical vapor deposited Ti1-xAlxN

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

Autoren

Externe Organisationseinheiten

  • CERATIZIT Austria GmbH
  • Christian Doppler Labor für Moderne beschichtete Schneidewerkzeuge, Leoben

Abstract

Owing to its extraordinary nanolamellar microstructure, chemical vapor deposited Ti 1-xAl xN has gained considerable interest in the recent years. However, the formation mechanism of the nanolamellae is not yet understood and is currently subject of intense research. In this publication we have deposited Ti 1-xAl xN coatings at varying temperature, pressure and rotation speed of the central gas feed. Transmission electron microscopy has been conducted in order to quantify the lamella periodicity and correlate it with the deposition parameters. This work demonstrates that nanolamellae can be obtained over a wide range of deposition parameters and, more importantly, that the periodicity does not seem to depend on the gas feed rotation but can be correlated with deposition temperature and pressure.

Details

OriginalspracheEnglisch
Aufsatznummer130819
Seitenumfang4
FachzeitschriftMaterials letters
Jahrgang305.2021
Ausgabenummer15 December
Frühes Online-Datum5 Sep 2021
DOIs
StatusVeröffentlicht - 15 Dez 2021