Influence of the deposition parameters on the nanolamella periodicity of chemical vapor deposited Ti1-xAlxN

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Influence of the deposition parameters on the nanolamella periodicity of chemical vapor deposited Ti1-xAlxN. / Saringer, Christian; Tkadletz, Michael; Thurner, Josef; Czettl, Christoph; Schalk, Nina.

in: Materials letters, Jahrgang 305.2021, Nr. 15 December, 130819, 15.12.2021.

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

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@article{f1f6aa8c245b41e199ed15623d747d74,
title = "Influence of the deposition parameters on the nanolamella periodicity of chemical vapor deposited Ti1-xAlxN",
abstract = "Owing to its extraordinary nanolamellar microstructure, chemical vapor deposited Ti 1-xAl xN has gained considerable interest in the recent years. However, the formation mechanism of the nanolamellae is not yet understood and is currently subject of intense research. In this publication we have deposited Ti 1-xAl xN coatings at varying temperature, pressure and rotation speed of the central gas feed. Transmission electron microscopy has been conducted in order to quantify the lamella periodicity and correlate it with the deposition parameters. This work demonstrates that nanolamellae can be obtained over a wide range of deposition parameters and, more importantly, that the periodicity does not seem to depend on the gas feed rotation but can be correlated with deposition temperature and pressure. ",
author = "Christian Saringer and Michael Tkadletz and Josef Thurner and Christoph Czettl and Nina Schalk",
note = "Publisher Copyright: {\textcopyright} 2021",
year = "2021",
month = dec,
day = "15",
doi = "10.1016/j.matlet.2021.130819",
language = "English",
volume = "305.2021",
journal = "Materials letters",
issn = "0167-577X",
publisher = "Elsevier",
number = "15 December",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Influence of the deposition parameters on the nanolamella periodicity of chemical vapor deposited Ti1-xAlxN

AU - Saringer, Christian

AU - Tkadletz, Michael

AU - Thurner, Josef

AU - Czettl, Christoph

AU - Schalk, Nina

N1 - Publisher Copyright: © 2021

PY - 2021/12/15

Y1 - 2021/12/15

N2 - Owing to its extraordinary nanolamellar microstructure, chemical vapor deposited Ti 1-xAl xN has gained considerable interest in the recent years. However, the formation mechanism of the nanolamellae is not yet understood and is currently subject of intense research. In this publication we have deposited Ti 1-xAl xN coatings at varying temperature, pressure and rotation speed of the central gas feed. Transmission electron microscopy has been conducted in order to quantify the lamella periodicity and correlate it with the deposition parameters. This work demonstrates that nanolamellae can be obtained over a wide range of deposition parameters and, more importantly, that the periodicity does not seem to depend on the gas feed rotation but can be correlated with deposition temperature and pressure.

AB - Owing to its extraordinary nanolamellar microstructure, chemical vapor deposited Ti 1-xAl xN has gained considerable interest in the recent years. However, the formation mechanism of the nanolamellae is not yet understood and is currently subject of intense research. In this publication we have deposited Ti 1-xAl xN coatings at varying temperature, pressure and rotation speed of the central gas feed. Transmission electron microscopy has been conducted in order to quantify the lamella periodicity and correlate it with the deposition parameters. This work demonstrates that nanolamellae can be obtained over a wide range of deposition parameters and, more importantly, that the periodicity does not seem to depend on the gas feed rotation but can be correlated with deposition temperature and pressure.

UR - http://www.scopus.com/inward/record.url?scp=85114463505&partnerID=8YFLogxK

U2 - 10.1016/j.matlet.2021.130819

DO - 10.1016/j.matlet.2021.130819

M3 - Article

VL - 305.2021

JO - Materials letters

JF - Materials letters

SN - 0167-577X

IS - 15 December

M1 - 130819

ER -