Journal of vacuum science & technology / A (JVST), 0734-2101

Journal

ISSNs0734-2101

Research output

  1. 2020
  2. Published

    Angular resolved mass-energy analysis of species emitted from a dc magnetron sputtered NiW-target

    Rausch, M., Mraz, S., Kreiml, P., Cordill, M. J., Schneider, J. M., Winkler, J. & Mitterer, C., 2020, In : Journal of vacuum science & technology / A (JVST). 38.2020, 2, p. 1-10 023401.

    Research output: Contribution to journalArticleResearchpeer-review

  3. Published

    Structure, stress, and mechanical properties of Mo-Al-N thin films deposited by dc reactive magnetron cosputtering: Role of point defects

    Angay, F., Löfler, L., Tetard, F., Eyidi, D., Djemia, P., Holec, D. & Abadias, G., 2020, In : Journal of vacuum science & technology / A (JVST). 2020, p. 1-14

    Research output: Contribution to journalArticleResearchpeer-review

  4. 2018
  5. Published

    Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature

    Pilz, J., Perrotta, A., Christian, P., Tazreiter, M., Resel, R., Leising, G., Griesser, T. & Coclite, A. M., 1 Jan 2018, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 36, 1, 01A109.

    Research output: Contribution to journalArticleResearchpeer-review

  6. Published
  7. Published
  8. Published

    Oxidation and wet etching behavior of sputtered Mo-Ti-Al films

    Jörg, T., Hofer-Roblyek, A. M., Köstenbauer, H., Winkler, J. & Mitterer, C., 2018, In : Journal of vacuum science & technology / A (JVST). 36, p. 021513-1-021513-5

    Research output: Contribution to journalArticleResearchpeer-review

  9. 2017
  10. Published

    Chemical composition and properties of MoAl thin films deposited by sputtering from MoAl compound targets

    Lorenz, R., O 'Sullivan, M., Sprenger, D., Lang, B. & Mitterer, C., 2017, In : Journal of vacuum science & technology / A (JVST). p. 041504-1 - 041504-6

    Research output: Contribution to journalArticleResearchpeer-review

  11. Published

    Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties

    Pachlhofer, J., Martin-Luengo, A. T., Franz, R., Franzke, E., Köstenbauer, H., Winkler, J., Bonanni, A. & Mitterer, C., 2017, In : Journal of vacuum science & technology / A (JVST). 35, 2, p. 021504-1 - 021504-8 8 p.

    Research output: Contribution to journalArticleResearchpeer-review

  12. Published

    Tailoring age hardening of Ti1-xAlxN by Ta alloying

    Großmann, B., Jamnig, A., Schalk, N., Czettl, C., Pohler, M. & Mitterer, C., 2017, In : Journal of vacuum science & technology / A (JVST). 35, 6, p. 060604-1-060604-6

    Research output: Contribution to journalArticleResearchpeer-review

  13. 2016
  14. Published

    Effect of discharge power on target poisoning and coating properties in reactive magnetron sputter deposition of TiN

    Saringer, C., Franz, R., Zorn, K. & Mitterer, C., 1 Jul 2016, In : Journal of vacuum science & technology / A (JVST). 34, 4, 8 p., 041517.

    Research output: Contribution to journalArticleResearchpeer-review

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