Plasma sources science & technology (Plasma Sources Science and technology), 0963-0252

Journal

ISSNs0963-0252

Research output

  1. 2020
  2. Published
  3. 2018
  4. Published
  5. 2016
  6. Published

    Influence of ionisation zone motion in high power impulse magnetron sputtering on angular ion flux and NbOx film growth

    Franz, R., Clavero, C., Anders, A. & Kolbeck, J., 2016, In : Plasma sources science & technology (Plasma Sources Science and technology). 25, p. 1-11 11 p.

    Research output: Contribution to journalArticleResearchpeer-review

  7. 2014
  8. Published

    Asymmetric particle fluxes from drifting ionization zones in sputtering magnetrons

    Panjan, M., Franz, R. & Anders, A., 2014, In : Plasma sources science & technology (Plasma Sources Science and technology). 23, p. 0250071-02500712

    Research output: Contribution to journalArticleResearchpeer-review

  9. Published

    Observation of multiple charge states and high ion energies in high-power impulse magnetron sputtering (HiPIMS) and burst HiPIMS using a LaB6 target

    Franz, R., Clavero, C., Bolat, R., Mendelsberg, R. & Anders, A., 2014, In : Plasma sources science & technology (Plasma Sources Science and technology). 23, p. 0350011-03500111

    Research output: Contribution to journalArticleResearchpeer-review