Vacuum, 0042-207X

Journal

ISSNs0042-207X

Research output

  1. 2016
  2. Published

    Structure evolution in reactively sputtered molybdenum oxide thin films

    Pachlhofer, J., Jachs, C., Franz, R., Franzke, E., Köstenbauer, H., Winkler, J. & Mitterer, C., 2016, In : Vacuum. 131, p. 246-251 6 p.

    Research output: Contribution to journalArticleResearchpeer-review

  3. 2014
  4. Published

    Influence of Si on the target oxide poisoning during reactive arc evaporation of (Al,Cr)2O3 coatings

    Paulitsch, J., Rachbauer, R., Ramm, J., Polcik, P. & Mayrhofer, P. H., 2014, In : Vacuum. 100, p. 29-32

    Research output: Contribution to journalArticleResearchpeer-review

  5. Published

    Sputtered molybdenum films: structure and property evolution with film thickness

    Hofer, A. M., Schlacher, J., Keckes, J., Winkler, J. & Mitterer, C., 2014, In : Vacuum. 99, p. 149-152

    Research output: Contribution to journalArticleResearchpeer-review

  6. 2009
  7. Published

    Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering

    Siffalovic, P., Majkova, E., Chitu, L., Jergel, M., Luby, S., Keckes, J., Maier, G. A., Timmann, A., Roth, S. V., Tsuru, T., Harada, T., Yamamoto, M. & Heinzmann, U., 2009, In : Vacuum. 89, p. 19-25

    Research output: Contribution to journalArticleResearchpeer-review

  8. 2008
  9. Published
  10. Published

    Transmission electron microscopy of nanocomposite Cr-B-N thin films

    Hegedüs, E., Kovács, I., Pecz, B., Toth, L., Budna, K. & Mitterer, C., 2008, In : Vacuum. 82, p. 209-213

    Research output: Contribution to journalArticleResearchpeer-review

  11. 2005
  12. Published

    Plasma CVD of alumina – unsolved problems

    Laimer, J., Fink, M., Mitterer, C. & Störi, H., 2005, In : Vacuum. 80, p. 141-145

    Research output: Contribution to journalArticleResearchpeer-review