Stephan Bigl

(Former)

Research output

  1. 2017
  2. Published

    Substrate-influenced thermo-mechanical fatigue of copper metallizations: Limits of Stoney's equation

    Bigl, S., Wurster, S., Cordill, M. J. & Kiener, D., 9 Nov 2017, In: Materials. 10, 11, 1287.

    Research output: Contribution to journalArticleResearchpeer-review

  3. Published

    Film thickness dependent microstructural changes of thick copper metallizations upon thermal fatigue

    Bigl, S., Trost, C. O. W., Wurster, S., Cordill, M. J. & Kiener, D., 14 Jun 2017, In: Journal of materials research (JMR). 32, 11, p. 2022-2034 13 p.

    Research output: Contribution to journalArticleResearchpeer-review

  4. Published

    Accelerated thermo-mechanical fatigue of copper metallizations studied by pulsed laser heating

    Wurster, S., Bigl, S., Cordill, M. J. & Kiener, D., 5 Jan 2017, In: Microelectronic engineering. 167, p. 110-118 9 p.

    Research output: Contribution to journalArticleResearchpeer-review

  5. Published
  6. 2016
  7. Published

    Correlative microstructure and topography informed nanoindentation of copper films

    Bigl, S., Schöberl, T., Wurster, S., Cordill, M. J. & Kiener, D., 25 Dec 2016, In: Surface & coatings technology. 308, p. 404-413 10 p.

    Research output: Contribution to journalArticleResearchpeer-review

  8. Published

    Advanced characterisation of thermo-mechanical fatigue mechanisms of different copper film systems for wafer metallizations

    Bigl, S., Wurster, S., Cordill, M. J. & Kiener, D., 1 Aug 2016, In: Thin solid films. 612, p. 153-164 12 p.

    Research output: Contribution to journalArticleResearchpeer-review

  9. Published
  10. Published

    Advanced Characterization of thermo-mechanical fatigue mechanisms for semiconductor metallizations

    Bigl, S., Wurster, S., Schöberl, T., Cordill, M. & Kiener, D., 2016.

    Research output: Contribution to conferencePresentationResearchpeer-review

  11. Published
  12. Published

    Structural changes in amorphous SiO2 films revealed by in-situ stress measurements up to 1000C

    Bigl, S. & Cordill, M., 2016.

    Research output: Contribution to conferencePosterResearchpeer-review

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