A comparative study on NbOx films reactively sputtered from sinterd and cold gas sprayed targets

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A comparative study on NbOx films reactively sputtered from sinterd and cold gas sprayed targets. / Lorenz, Roland; O`Sullivan, M.; Fian, Alexander; Sprenger, D.; Lang, Bernhard; Mitterer, Christian.

In: Applied surface science, 2018, p. 1157-1162.

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@article{07919c0efeb743e0817f2d22cb44c476,
title = "A comparative study on NbOx films reactively sputtered from sinterd and cold gas sprayed targets",
author = "Roland Lorenz and M. O`Sullivan and Alexander Fian and D. Sprenger and Bernhard Lang and Christian Mitterer",
year = "2018",
doi = "10.1016/j.apsusc.2017.12.165",
language = "English",
pages = "1157--1162",
journal = "Applied surface science",
issn = "0169-4332",
publisher = "Elsevier",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - A comparative study on NbOx films reactively sputtered from sinterd and cold gas sprayed targets

AU - Lorenz, Roland

AU - O`Sullivan, M.

AU - Fian, Alexander

AU - Sprenger, D.

AU - Lang, Bernhard

AU - Mitterer, Christian

PY - 2018

Y1 - 2018

U2 - 10.1016/j.apsusc.2017.12.165

DO - 10.1016/j.apsusc.2017.12.165

M3 - Article

SP - 1157

EP - 1162

JO - Applied surface science

JF - Applied surface science

SN - 0169-4332

ER -