Correlating structural and mechanical properties of AlN / TiN superlattice films

Research output: Contribution to journalArticleResearchpeer-review

Authors

  • Nikola Koutná
  • Petr Rehák
  • Zhuo Chen
  • Matthias Bartosik
  • Markus Fallmann
  • Miroslav Cerny
  • Zhaoli Zhang
  • Martin Friák
  • Mojmír Šob
  • Paul Heinz Mayrhofer

External Organisational units

  • Erich Schmid Institute of Materials Science
  • Institute of Materials Science, TU Wien
  • Institute of Physics of Materials of the Academy of Sciences of the Czech Republic
  • Institute of Materials Science and Technology
  • CEITEC - Central European Institute of Technology, Masaryk University, Purkyňova 123, 612 00 Brno, Czech Republic
  • Masaryk University
  • Brno University of Technology

Abstract

Combining first-principles and experimental techniques, we establish Young's modulus dependence of AlN/TiN superlattices on the film-forming phases, their thicknesses and crystallographic orientations. The disparate character of cleavage properties within different layers of the superlattice—providing indications regarding crack initiation processes—is linked to the changes in bond lengths. Such changes present a direct consequence of the predicted interplanar spacing oscillations which are experimentally confirmed by high resolution transmission electron microscopy analyses.

Details

Original languageEnglish
Pages (from-to)159-163
Number of pages5
JournalScripta materialia
Volume165.2019
Issue numberMay
DOIs
Publication statusPublished - 1 May 2019