Effect of crystal orientation on the hardness and strength of piezoelectric LiNbO3 substrates for microelectronic applications
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Effect of crystal orientation on the hardness and strength of piezoelectric LiNbO3 substrates for microelectronic applications. / Gruber, Manuel; Leitner, Alexander; Kiener, Daniel; Supancic, Peter; Bermejo, Raul.
In: Materials and Design, 2022.Research output: Contribution to journal › Article › Research › peer-review
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TY - JOUR
T1 - Effect of crystal orientation on the hardness and strength of piezoelectric LiNbO3 substrates for microelectronic applications
AU - Gruber, Manuel
AU - Leitner, Alexander
AU - Kiener, Daniel
AU - Supancic, Peter
AU - Bermejo, Raul
PY - 2022
Y1 - 2022
U2 - https://doi.org/10.1016/j.matdes.2021.110306
DO - https://doi.org/10.1016/j.matdes.2021.110306
M3 - Article
JO - Materials and Design
JF - Materials and Design
SN - 0264-1275
M1 - 110306
ER -
