Entwicklung und Simulation einer "Run to Run" Regelungsschleife für Ofenprozesse in der Halbleiterindustrie

Research output: ThesisMaster's Thesis (University Course)Researchpeer-review

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Translated title of the contributionDevelopment and simulation of a run to run controller for semiconductor furnace processes
Original languageGerman
QualificationDipl.-Ing.
Awarding Institution
Supervisors/Advisors
Publication statusPublished - 25 Nov 2004