Fast Cross-Linking-Characterization of Waveguide-Polymers on Wafers by Imaging Low-Coherence Interferometry

Research output: Contribution to journalArticleResearchpeer-review

Authors

External Organisational units

  • University of Applied Sciences Zwickau
  • Technische Universität Dresden
  • Fraunhofer Application Center for Optical Metrology and Surface Technologies AZOM
  • Polymer Competence Center Leoben GmbH

Details

Original languageEnglish
Article number1046
JournalProceedings / MDPI AG
Volume2.2018
Issue number13
DOIs
Publication statusPublished - 2019