Influence of carbon deficiency on phase formation and thermal stability of super-hard TaCy thin films

Research output: Contribution to journalArticleResearchpeer-review


  • Helmut Riedl
  • Thomas Glechner
  • Tomasz Wojcik
  • Nikola Koutná
  • Szilárd Kolozsvári
  • Valentina Paneta
  • Daniel Primetzhofer
  • Paul Heinz Mayrhofer

External Organisational units

  • Institute of Materials Science and Technology
  • Plansee Composite Materials GmbH
  • Institute of Materials Science and Technology, TU Wien
  • Department of Physics and Astronomy, Uppsala University


Original languageEnglish
Pages (from-to)150-154
Number of pages5
JournalScripta materialia
Issue numberMay
Publication statusPublished - 9 Mar 2018