Interface fracture and chemistry of a tungsten-based metallization on borophosphosilicate glass

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Interface fracture and chemistry of a tungsten-based metallization on borophosphosilicate glass. / Völker, B.; Heinz, W.; Matoy, K. et al.

In: Philosophical magazine, Vol. 95, No. 16-18, 23.06.2015, p. 1967-1981.

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Völker B, Heinz W, Matoy K, Roth R, Batke JM, Schöberl T et al. Interface fracture and chemistry of a tungsten-based metallization on borophosphosilicate glass. Philosophical magazine. 2015 Jun 23;95(16-18):1967-1981. doi: 10.1080/14786435.2014.913108

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@article{01fdd3e40f904a938305452c761f934e,
title = "Interface fracture and chemistry of a tungsten-based metallization on borophosphosilicate glass",
keywords = "4-point bending, interface energy release rate, W(TI)/BPSG interface",
author = "B. V{\"o}lker and W. Heinz and K. Matoy and R. Roth and Batke, {J. M.} and T. Sch{\"o}berl and C. Scheu and G. Dehm",
year = "2015",
month = jun,
day = "23",
doi = "10.1080/14786435.2014.913108",
language = "English",
volume = "95",
pages = "1967--1981",
journal = "Philosophical magazine",
issn = "0031-8086",
number = "16-18",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Interface fracture and chemistry of a tungsten-based metallization on borophosphosilicate glass

AU - Völker, B.

AU - Heinz, W.

AU - Matoy, K.

AU - Roth, R.

AU - Batke, J. M.

AU - Schöberl, T.

AU - Scheu, C.

AU - Dehm, G.

PY - 2015/6/23

Y1 - 2015/6/23

KW - 4-point bending

KW - interface energy release rate

KW - W(TI)/BPSG interface

UR - http://www.scopus.com/inward/record.url?scp=84932200010&partnerID=8YFLogxK

U2 - 10.1080/14786435.2014.913108

DO - 10.1080/14786435.2014.913108

M3 - Article

AN - SCOPUS:84932200010

VL - 95

SP - 1967

EP - 1981

JO - Philosophical magazine

JF - Philosophical magazine

SN - 0031-8086

IS - 16-18

ER -