Room-Temperature Deposition of DLC Films by an Ion Beam Method, Reactive Magnetron Sputtering and Pulsed Laser Deposition: Process Design, Film Structure and Film Properties

Research output: ThesisDoctoral ThesisResearch

Authors

Abstract

The aim of the present thesis was the physical vapour deposition (PVD) process development and investigation of the film structure/properties relationships of room-temperature (

Details

Translated title of the contributionRaum-Temperatur Abscheidung von DLC-Schichten mit einer Ionenstrahlmethode, reaktivem Magnetronkathodenzerstäuben und gepulster Laser Dampfphasenabscheidung: Prozess-Design, Schichtstruktur und Schichteigenschaften
Original languageEnglish
QualificationDr.mont.
Supervisors/Advisors
Publication statusPublished - 2009