Room-Temperature Deposition of DLC Films by an Ion Beam Method, Reactive Magnetron Sputtering and Pulsed Laser Deposition: Process Design, Film Structure and Film Properties

Research output: ThesisDoctoral Thesis

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@phdthesis{17491c7de83348ae90a19bbad0dfeb7c,
title = "Room-Temperature Deposition of DLC Films by an Ion Beam Method, Reactive Magnetron Sputtering and Pulsed Laser Deposition: Process Design, Film Structure and Film Properties",
abstract = "The aim of the present thesis was the physical vapour deposition (PVD) process development and investigation of the film structure/properties relationships of room-temperature (",
keywords = "Amorphous Carbon Films (a-C) Physical Vapour Deposition (PVD) Magnetron Sputtering Pulsed Laser Deposition (PLD) Raman Spectroscopy, Amorphe Kohlenstoffschichten (a-C) Physikalische Dampfphasenabscheidung (PVD) Magnetronkathoden-Zerst{\"a}uben (Sputtern) gepulste Laser Dampfphasenabscheidung (PLD) Raman Spektroskopie",
author = "Markus Kahn",
note = "embargoed until null",
year = "2009",
language = "English",

}

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TY - THES

T1 - Room-Temperature Deposition of DLC Films by an Ion Beam Method, Reactive Magnetron Sputtering and Pulsed Laser Deposition: Process Design, Film Structure and Film Properties

AU - Kahn, Markus

N1 - embargoed until null

PY - 2009

Y1 - 2009

N2 - The aim of the present thesis was the physical vapour deposition (PVD) process development and investigation of the film structure/properties relationships of room-temperature (

AB - The aim of the present thesis was the physical vapour deposition (PVD) process development and investigation of the film structure/properties relationships of room-temperature (

KW - Amorphous Carbon Films (a-C) Physical Vapour Deposition (PVD) Magnetron Sputtering Pulsed Laser Deposition (PLD) Raman Spectroscopy

KW - Amorphe Kohlenstoffschichten (a-C) Physikalische Dampfphasenabscheidung (PVD) Magnetronkathoden-Zerstäuben (Sputtern) gepulste Laser Dampfphasenabscheidung (PLD) Raman Spektroskopie

M3 - Doctoral Thesis

ER -