Simulation von EUV-Spiegeln

Research output: Contribution to conferencePosterTransfer

Organisational units

Details

Original languageGerman
Publication statusPublished - 17 May 2018
EventSilicon Alps Spotlight: Neue Materialien und Materialtechnologien für Innovationen in der Mikro­elektronik - Impulszentrum Werkstoffe, Leoben, Austria
Duration: 17 May 201817 May 2018
https://www.silicon-alps.at/veranstaltungen/silicon-alps-spotlight-materialforschung-fuer-mikroelektronik-in-leoben/

Conference

ConferenceSilicon Alps Spotlight
CountryAustria
CityLeoben
Period17/05/1817/05/18
Internet address