Thickness Dependence of crack initiation and propagation in stacks for piezoelectric microelectromechanical systems

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Thickness Dependence of crack initiation and propagation in stacks for piezoelectric microelectromechanical systems. / Coleman, Kathleen; Bermejo, Raul; Leguillon, Dominique; Trolier-McKinstry, Susan.

In: Acta Materialia, Vol. 191, 06.2020, p. 245-252.

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Coleman, Kathleen ; Bermejo, Raul ; Leguillon, Dominique ; Trolier-McKinstry, Susan. / Thickness Dependence of crack initiation and propagation in stacks for piezoelectric microelectromechanical systems. In: Acta Materialia. 2020 ; Vol. 191. pp. 245-252.

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@article{f725c5baa1f9461e868bcb76543b2b1e,
title = "Thickness Dependence of crack initiation and propagation in stacks for piezoelectric microelectromechanical systems",
keywords = "Thin film, PZT, Cracking, Stress criterion, Biaxial bending",
author = "Kathleen Coleman and Raul Bermejo and Dominique Leguillon and Susan Trolier-McKinstry",
year = "2020",
month = jun,
doi = "10.1016/j.actamat.2020.03.030",
language = "Undefined/Unknown",
volume = "191",
pages = "245--252",
journal = "Acta materialia",
issn = "1359-6454",
publisher = "Elsevier BV",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Thickness Dependence of crack initiation and propagation in stacks for piezoelectric microelectromechanical systems

AU - Coleman, Kathleen

AU - Bermejo, Raul

AU - Leguillon, Dominique

AU - Trolier-McKinstry, Susan

PY - 2020/6

Y1 - 2020/6

KW - Thin film, PZT, Cracking, Stress criterion, Biaxial bending

UR - https://doi.org/10.1016/j.actamat.2020.03.030

U2 - 10.1016/j.actamat.2020.03.030

DO - 10.1016/j.actamat.2020.03.030

M3 - Article

VL - 191

SP - 245

EP - 252

JO - Acta materialia

JF - Acta materialia

SN - 1359-6454

ER -